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Function and Method(s):
Dry Etching
Equipment Used:
MRC Reactive Ion Etcher (mrc)
Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)
Summary of Nitride Dry Etch Processes
Summary of Nitride Dry Etch Processes
Source:
Summary of Nitride Dry Etch Processes
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