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Function and Method(s):
Dry Etching
Plasma Enhanced (PE) CVD
Equipment Used:
PlasmaTherm Shuttlelock PECVD System (ccp-dep)
Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)
SiNx Deposition and Etching recipe Development- Final Presentation
SiNx Deposition and Etching recipe Development- Final Presentation
PDF File:
SiNx Deposition and Etching recipe Development- Final Presentation
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Thursday, August 10, 2023
