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Function and Method(s):
Plasma Enhanced (PE) ALD
Equipment Used:
Fiji 1 ALD (fiji1)
Fiji 2 ALD (fiji2)
ALD TiN- Final Presentation
ALD TiN- Final Presentation
PDF File:
ALD TiN- Final Presentation
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Materials
Titanium NItride (TiN)
Thursday, August 10, 2023
