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Function and Method(s):
Etching
Equipment Used:
PlasmaTherm Shuttlelock PECVD System (ccp-dep)
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
Related Documentation
Project
Fabrication of an Etched Silicon Microdissection Platform with Applications in Organotypic Culture and Personalized Immunotherapy Testing
SOP- Silicon Oxide Hardmask for Si Etching in PT-DSE
SOP- Silicon Oxide Hardmask for Si Etching in PT-DSE
PDF File:
sop_silicon_oxide_hard_mask.pdf
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Thursday, August 10, 2023
