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Function and Method(s):
Patterning
Equipment Used:
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
Related Documentation
Project
Released Lithium Niobate Structures on Silicon using the PT-DSE
SOP- Released Structures with the PT-DSE
SOP - Released Structures with the PT-DSE
PDF File:
SOP - Released Structures with the PT-DSE
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Materials
Aluminum (Al)
Thursday, August 10, 2023
