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Equipment Used:
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
PlasmaTherm Shuttlelock PECVD System (ccp-dep)
Related Documentation
Project
Fabrication of an Etched Silicon Microdissection Platform with Applications in Organotypic Culture and Personalized Immunotherapy Testing
SOP- Fabrication of an Etched Silicon Platform with Applications in Uniform Dissection of Biological Samples
SOP- Fabrication of an Etched Silicon Platform with Applications in Uniform Dissection of Biological Samples
PDF File:
engr241_udicer_winter_quarter_sop_nc_sc_sk.pdf
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Thursday, August 10, 2023
