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Function and Method(s):
Metal Clean
Equipment Used:
Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)
Related Documentation
Project
Superconducting Parallel Plate Capacitors with High Kinetic Inductance
Superconducting Parallel Plate Capacitors with High Kinetic Inductance
Superconducting Parallel Plate Capacitors with High Kinetic Inductance
Post-metal etch clean
Post-metal etch clean
PDF File:
Post-metal etch clean
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Thursday, August 10, 2023
