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Equipment Used:
Lesker Sputter (lesker-sputter)
Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)
Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)
Niobium Deposition and Patterning Runsheet
Niobium Deposition and Patterning Runsheet
PDF File:
Niobium Deposition and Patterning Runsheet
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Thursday, August 10, 2023
