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Function and Method(s):
Dry Etching
Equipment Used:
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
Related Documentation
Project
Released Lithium Niobate Structures on Silicon using the PT-DSE
Determining etch rates with partially released structures
Determining etch rates with partially released structures
PDF File:
Determining etch rates with partially released structures
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Thursday, August 10, 2023
